微孔陶瓷吸盤Fine-Pore Ceramic Chuck Tables

微孔陶瓷吸盤是一種利用真空吸附原理固定工件的承載平臺，公司生產的微孔陶瓷吸盤可以和日本、德國、以色列、美國、韓國及國產的設備配套使用，具有優越的性能價格比。

Fine-pore ceramic chuck table is a bearing platform for fixing workpieces by the vacuum adsorption principle. These products which have high cost performance produced by the company can match with the machines made in Japan,Germany, Israel, the United States, Korea and China.

主要特點：

微孔陶瓷吸盤具有平面度、平行度高，組織致密均勻，強度高，透氣性好，吸附力均勻，易于修整等特點。

加工對象：2、3、4、5、6、8、12 英寸半導體片。

配套機床：減薄機、劃片機、清洗機等。

吸盤類型：微孔陶瓷

Main characteristics:

Fine-pore ceramic chuck table has the characteristics of high flatness and parallelism, compact and uniform structure with high strength, good permeability, uniform adsorption affinity and dressing easily.

Workpiece processed:2,3,4,5,6,8,12 inches semiconductor wafer.

Suitable devices: Wafer grinder, dicing machine and cleaning machine ,etc.

Chuck type: Fine-pore ceramic

型號規格：

底座及邊框可選材質：鋁合金、不銹鋼、陶瓷。

尺寸范圍：φ5mm-φ500mm

微孔尺寸：5-700um

氣 孔 率：30-40%

透氣均勻性：10×10mm 區域內壓差±3Kpa

可根據用戶要求設計和制造各種非標吸盤。

Specifcations:

Optional material for base and frame: Aluminum Alloy,Stainless Steel, Ceramics.

Size range: φ5mm-φ500mm

Micropore size: 5-700um

Porosity: 30-40%

Permeability uniformity: 10 x 10 mm pressure difference(±3 Kpa)

We can design and make nonstandard chuck tables according to customers' requirement.